Australian National Fabrication Facility – Queensland Node (ANFF-QLD)

Australian National Fabrication Facility

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Researcher in fabrication clean room

ANFF-QLD operates at The University of Queensland in partnership with Griffith University, ANFF-QLD forms part of the national Australian National Fabrication Facility (ANFF), supported through the National Collaborative Research Infrastructure Strategy (NCRIS).

ANFF-QLD supports research, innovation and technology commercialisation across semiconductor technologies, quantum, photonics, microfluidics, advanced materials, biotechnology, medtech and emerging advanced manufacturing sectors.

Services span process development, rapid prototyping, pilot-scale manufacturing, technology translation and technical consultation and project support.

Users can:

  • Access over 90 advanced fabrication and characterisation systems within ISO Class 5, 6 and 7 cleanrooms.
  • Develop and prototype novel devices with expert technical support.
  • Undertake collaborative R&D, process optimisation and technology scale-up.
  • Access specialised contract fabrication and industry engagement services.
Website
https://anff-q.org.au/
Organisation type
  • National Collaborative Research Infrastructure Scheme facility
  • Not-for-profit
Number of research staff
20-100 research staff
Address
Building 75, Cnr College Rd & Cooper Rd, St Lucia QLD 4072

Strengths and capabilities

  • Semiconductor and microfabrication process development
  • Photonics, optoelectronics and integrated photonic devices
  • Quantum device fabrication and processing
  • Microfluidic and Lab-on-a-Chip systems
  • Biomaterials, biointerfaces and biomedical devices
  • Thin-film deposition (PVD, PECVD, ALD)
  • Photolithography and electron beam lithography
  • Nano 3D printing and additive manufacturing
  • Dry and wet etching technologies
  • Advanced materials synthesis and characterisation
  • Microelectronics and MEMS fabrication
  • Wafer bonding, dicing and device packaging
  • Advanced imaging and surface characterisation (Confocal, Raman, AFM, SEM)
  • Industry collaboration, prototyping and commercialisation support
  • Expert technical consultation and project delivery services

Facilities and major equipment

  • Access over 90 advanced fabrication and characterisation systems within ISO Class 5, 6 and 7 cleanrooms.
  • Develop and prototype novel devices with expert technical support.
  • Undertake collaborative R&D, process optimisation and technology scale-up.
  • Access specialised contract fabrication and industry engagement services.
  • Globally unique epitaxial reactor for SiC on Si wafer production
  • State-of-the-art surface and device characterisation suite

Key science sectors

More information about the sectors this centre is involved in:

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